Defect structure of tin-doped inas single crystals grown by the Czochralski method

N. A. Sanjarovskii; Санжаровский Н. А.; I. B. Parfenteva; Парфентьева И. Б.; T. G. Yugova; Югова Т. Г.; S. N. Knyazev; Князев С. Н.

doi:10.31857/S0023476124030041

Defect structure of tin-doped inas single crystals grown by the Czochralski method

Authors: Sanjarovskii N.A.¹, Parfenteva I.B.¹, Yugova T.G.¹, Knyazev S.N.¹
Affiliations:
1. The State Research and Design Institute of the Rare Metal Industry (JSC Giredmet)
Issue: Vol 69, No 3 (2024)
Pages: 400-404
Section: REAL STRUCTURE OF CRYSTALS
URL: https://rjmseer.com/0023-4761/article/view/673169
DOI: https://doi.org/10.31857/S0023476124030041
EDN: https://elibrary.ru/XOZLFO
ID: 673169

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Abstract

Indium arsenide (InAs) single crystals heavily doped with Sn are found to have various violations of structural perfection, which depend on the Sn concentration in different regions of crystal. At low charge-carrier (electron) concentrations (~1.5 × 10¹⁸ cm^–3) an unusual annular distribution of dislocations in the cross section is observed for the initial parts of crystal. The dislocation density lies in the range of (0.1–1.0) × 10⁴ cm^–2. At a carrier concentration above 4.0 × 10¹⁸ cm^–3 indium inclusions and “vicinal growth hillocks” are observed in the final parts of crystals. The dislocation density in the final cross sections of crystals, in which the aforementioned defects are not observed, is in the range of (0.4–2.1) × 10⁴ cm^–2.

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References

Карандашев С.А., Матвеев Б.А., Ременный М.А. // Физика и техника полупроводников. 2019. Т. 53. С. 147. https://doi.org/10.21883/FTP.2019.02.47090.8799
Зотова Н.В., Ильинская Н.Д., Карандашев С.А. и др. // Физика и техника полупроводников. 2008. Т. 42. Вып. 6. С. 26. https://doi.org/10.1134/S1063782608060018 https://www.shalomeo.com/Wafers-and-Substrates/InAs-Semi-Growth/product-936.html
Abrachams M.S., Buiocchi C.J. // J. Appl. Phys. 1965. V. 36. P. 2855. https://doi.org/10.1063/1.1714594
Шифрин С.С., Мильвидский М.Г., Освенский В.Б. // Кристаллография. 1982. Т. 27. Вып. 4. С. 712.
Мильвидский М.Г., Освенский В.Б. // Структурные дефекты в монокристаллах полупроводников. М.: Металлург, 1984. С. 5. https://www.studmed.ru/milvidskiy-m-g-osvenskiy-v-b-strukturnye-defekty-v-monokristallah-poluprovodnikov_6a780cf3b60.html
Мильвидский М.Г., Освенский В.Б. // Структурные дефекты в монокристаллах полупроводников. М.: Металлург, 1984. С. 188. https://www.studmed.ru/milvidskiy-m-g-osvenskiy-v-b-strukturnye-defekty-v-monokristallah-poluprovodnikov_6a780cf3b60.html