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Polymethyl Methacrylate with a Molecular Weight of 107 g/mol for X-Ray Lithography
- Authors: Nazmov V.P.1,2, Varand A.V.1, Mikhailenko M.A.2, Goldenberg B.G.1,3, Prosanov I.Y.2, Gerasimov K.B.2
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Affiliations:
- Budker Institute of Nuclear Physics of SB RAS
- Institute of Solid State Chemistry and Mechanochemistry of SB RAS
- Shared-Use Center “SKIF”, Boreskov Institute of Catalysis of SB RAS
- Issue: No 6 (2023)
- Pages: 27-31
- Section: Articles
- URL: https://rjmseer.com/1028-0960/article/view/664547
- DOI: https://doi.org/10.31857/S1028096023060110
- EDN: https://elibrary.ru/DKCOQS
- ID: 664547
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Abstract
The results of a study of syndiotactic polymethyl methacrylate with a molecular weight of 107 g/mol, synthesized via ionic polymerization with radiation initiation, are presented. Changes in the chemical structure of the polymer material have been analyzed by IR spectroscopy, differential thermal analysis, and gel permeation chromatography. During thermal decomposition of the initial polymer, the mass loss process can be divided into three stages: low-temperature, medium-temperature, and high-temperature. The pronounced thermal effect of polymer melting disappears even after exposure to minimal doses of ionizing radiation. A relatively rapid decrease in the molecular weight under the influence of X-ray radiation in the dose range up to 100 J/cm3 and a scatter in molecular sizes have been found. Polydispersity at low doses is approximately 3.5 times higher than that at doses of the order of 10 kJ/cm3. A latent image development rate of approximately five times higher than that of a polymer with a molecular weight of 106 g/mol under standard conditions was achieved. The contrast value was 3.4. Using X-ray synchrotron radiation at the VEPP-3 source, microstructuring was carried out by X-ray lithography. Microstructures up to 5 µm high and about 2 µm in diameter were obtained.
About the authors
V. P. Nazmov
Budker Institute of Nuclear Physics of SB RAS; Institute of Solid State Chemistry and Mechanochemistry of SB RAS
Author for correspondence.
Email: V.P.Nazmov@inp.nsk.su
Russia, 630090, Novosibirsk; Russia, 630090, Novosibirsk
A. V. Varand
Budker Institute of Nuclear Physics of SB RAS
Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk
M. A. Mikhailenko
Institute of Solid State Chemistry and Mechanochemistry of SB RAS
Author for correspondence.
Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk
B. G. Goldenberg
Budker Institute of Nuclear Physics of SB RAS; Shared-Use Center “SKIF”, Boreskov Institute of Catalysis of SB RAS
Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk; Russia, 630559, Novosibirsk
I. Yu. Prosanov
Institute of Solid State Chemistry and Mechanochemistry of SB RAS
Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk
K. B. Gerasimov
Institute of Solid State Chemistry and Mechanochemistry of SB RAS
Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk
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