Formation of ultra-smooth highly orientated ZnO films on amorphous surface (SiO2/Si) by magnetron sputtering
- Authors: Ismailov А.М.1, Guidalaeva Т.А.1, Muslimov А.E.2, Grigoriev Y.V.2, Kanevsky V.М.2
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Affiliations:
- Dagestan State University
- Kurchatov Complex of Crystallography and Photonics, National Research Centre “Kurchatov Institute”
- Issue: No 10 (2024)
- Pages: 9-16
- Section: Articles
- URL: https://rjmseer.com/1028-0960/article/view/664728
- DOI: https://doi.org/10.31857/S1028096024100029
- EDN: https://elibrary.ru/SHQRBK
- ID: 664728
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