Estimation of internal charging potential of dielectrics coated with conductive film

Cover Page

Cite item

Full Text

Open Access Open Access
Restricted Access Access granted
Restricted Access Subscription or Fee Access

Abstract

The charging potentials of quartz glass coated with a conductive metallic film was evaluated. Estimations were made based on the measured dependence of the intensity of the cathodoluminescent signal on the energy of the incident electron beam. Calculations have shown that when quartz glass coated with a 14 nm thick Au film is irradiated, the charging potential can reach 1.7 kV at an electron energy of 10 keV and 2.7 kV at 15 keV. An estimation of the electric field generating under the surface of the grounded film has shown that the field strength does not exceed 4 × 107 V/cm.

Full Text

Restricted Access

About the authors

N. G. Orlikovskaya

Lomonosov Moscow State University

Author for correspondence.
Email: orlikovskayang@gmail.com
Russian Federation, Moscow, 119991

E. Yu. Zykova

Lomonosov Moscow State University

Email: orlikovskayang@gmail.com
Russian Federation, Moscow, 119991

A. A. Tatarintsev

Lomonosov Moscow State University

Email: orlikovskayang@gmail.com
Russian Federation, Moscow, 119991

References

  1. Петров В.И. // Успехи физических наук. 1996. Т. 166. С. 859.
  2. Melchinger A., Hofmann S. // J. Appl. Phys. 1995. V. 78. P. 6224. https://doi.org/10.1063/1.360569
  3. Cazaux J. // J. Appl. Phys. 2001. V. 89. P. 8265. https://doi.org/10.1063/1.1368867
  4. Cornet N., Goeuriot D., Guerret-Piécourt C., Juv́ D., Tŕheux D., Touzin M., Fitting H.J. // J. Appl. Phys. 2008. V. 103. Р. 064110. https://doi.org/10.1063/1.2890427
  5. Askri B., Raouadi K., Renoud R., Yangui B. // J. Electrostat. 2009. V. 67. P. 695. https://doi.org/10.1016/j.elstat.2009.03.006
  6. Рау Э.И., Татаринцев А.А. // Физика твердого тела. 2021. Т. 63. С. 483. https://doi.org/10.21883/FTT.2021.04.50713.246
  7. Cazaux J. // J. Appl. Phys. 1986. V. 59. P. 1418. https://doi.org/10.1063/1.336493
  8. Cazaux J. // Scanning. 2004. V. 26. P. 181. https://doi.org/10.1002/sca.4950260406
  9. Meyza X., Goeuriot D., Guerret-Piécourt C., Tréheux D., Fitting H.J. // J. Appl. Phys. 2003. V. 94. P. 5384. https://doi.org/10.1063/1.1613807
  10. Touzin M., Goeuriot D., Guerret-Piécourt C., Juv́ D., Tŕheux D., Fitting H.J. // J. Appl. Phys. 2006. V. 99. Р. 114110. https://doi.org/10.1063/1.2201851
  11. Татаринцев А.А., Зыкова Е.Ю., Иешкин А.Е., Орликовская Н.Г., Рау Э.И. // Физика твердого тела. 2023. Т. 65. С. 1288. https://doi.org/10.21883/ftt.2023.08.56145.79
  12. Ohya K., Inai K., Kuwada H., Hayashi T., Saito M. // Surf. Coatings Technol. 2008. V. 202. P. 5310. https://doi.org/10.1016/j.surfcoat.2008.06.008
  13. Cazaux J. // J. Electron Spectr. Relat. Phenomena. 2010. V. 176. P. 58. https://doi.org/10.1016/j.elspec.2009.06.004
  14. Орехова К.Н., Серов Ю.М., Дементьев П.А., Иванова Е.В., Кравец В.А., Усачева В.П., Заморянская М.В. // Журнал технической физики. 2019. Т. 89. С. 1412. https://doi.org/10.21883/jtf.2019.09.48068.43-19
  15. Рау Э.И., Татаринцев А.А., Зыкова Е.Ю., Зайцев С.В. // Журнал технической физики. 2019. Т. 89. С. 1276. https://doi.org/10.21883/jtf.2019.08.47904.264-18
  16. Зайцев С.В., Купреенко С.Ю., Лукьянов А.Е., Рау Э.И., Татаринцев А.А., Хайдаров А.А. // Изв. РАН. Сер. физ. 2016. Т. 80. С. 1623. https://doi.org/10.7868/s0367676516120206
  17. Fitting H.J. // J. Electron Spectr. Relat. Phenomena. 2004. V. 136. P. 265. https://doi.org/10.1016/j.elspec.2004.04.003
  18. Phillips M.R. // Microchim. Acta. 2006. V. 155. P. 51. https://doi.org/10.1007/s00604-006-0506-0
  19. Кузнецова Я.В. Особенности катодолюминесценции полупроводниковых структур на основе AlInGaN: Дис. … канд. физ.-мат. наук: 01.04.10. Санкт-Петербург: ФТИ, 2013.
  20. Гареева А.Р., Петров В.И., Чижов Г.А. // Вестн. МГУ. Сер. 3. 1989. Т. 30. С. 23.
  21. Михеев Н.Н., Петров В.И., Степович М.А. // Изв. АНаук СССР. Сер. физ. 1991. Т. 55. С. 1474.
  22. August H., Wernisch J. // Phys. Stat. Sol. 1989. V. 114. P. 629.
  23. Hunger H.-J., Kuchler L. // Phys. Stat. Sol. 1979. V. 56. P. 45.
  24. Drouin D., Couture A.R., Joly D., Tastet X., Aimez V., Gauvin R. // Scanning. 2007. V. 29. P. 92. https://doi.org/10.1002/sca.20000
  25. Рау Э.И., Евстафьева Е.Н., Зайцев С.И., Князев М.А., Свинцов А.А., Татаринцев А.А. // Микроэлектроника. 2013. Т. 42. С. 116. https://doi.org/10.7868/s0544126913020105
  26. Kotera M., Suga H. // J. Appl. Phys. 1988. V. 63. P. 261. https://doi.org/10.1063/1.340285
  27. Сканави Г.И. Физика диэлектриков (область сильных полей). М.: ГИФМЛ, 1958. 907 с.
  28. Франц В. Пробой диэлектриков. М.: ИЛ, 1961. 207 с.

Supplementary files

Supplementary Files
Action
1. JATS XML
Download
2. Fig. 1. Dependence of the intensity of the cathodoluminescence signal ICL of quartz glass (1), glass coated with a gold film (2), and the charging potential VS of quartz (3) on the time of irradiation with electrons with an energy of E0 = 10 (a) and 15 keV (b), and a current density of j0 = 10–5 A/cm2.

Download (25KB)
Indexing metadata
3. Fig. 2. The change in the interaction region in quartz glass calculated using the Casino v2.5 program when the energy of the electron probe changes from 8.4 (A) to 6.7 keV (B) due to charging.

Download (26KB)
Indexing metadata
4. Fig. 3. Calculated dependences of the potential V (1, 2) and the electric field strength Ein (3, 4) in quartz glass on the depth z at E0 = 10 (1, 3) and 15 keV (2, 4).

Download (15KB)
Indexing metadata

Copyright (c) 2024 Russian Academy of Sciences