Synthesis of diamond films with reduced roughness in microwave plasma
- Authors: Martyanov А.K.1, Tiazhelov I.A.1, Savin S.S.2, Popovich A.F.1, Sedov V.S.1, Konov V.I.1
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Affiliations:
- Prokhorov General Physics Institute of the Russian Academy of Sciences
- MIREA – Russian Technological University
- Issue: Vol 516, No 1 (2024)
- Pages: 28-31
- Section: ФИЗИКА
- URL: https://rjmseer.com/2686-7400/article/view/651782
- DOI: https://doi.org/10.31857/S2686740024030046
- EDN: https://elibrary.ru/KAHZCC
- ID: 651782
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