Device for precision positioning of low temperature plasma sources
- Authors: Konchekov E.M.1, Konkova A.S.1, Knyazev A.V.1, Glinushkin A.P.1, Gudkov S.V.1
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Affiliations:
- Prokhorov General Physics Institute of the Russian Academy of Sciences
- Issue: Vol 518, No 1 (2024)
- Pages: 69-74
- Section: ТЕХНИЧЕСКИЕ НАУКИ
- URL: https://rjmseer.com/2686-7400/article/view/677509
- DOI: https://doi.org/10.31857/S2686740024050118
- EDN: https://elibrary.ru/HXCPAB
- ID: 677509
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